Oxidation and diffusion processes during annealing of AlCrVN hard coatings

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • B. Schaffer
  • H. Hutter
  • R. Kaindl
  • Bernhard Sartory
  • Richard Tessadri
  • Peter Polcik

Details

Translated title of the contributionOxidation and diffusion processes during annealing of AlCrVN hard coatings
Original languageEnglish
Pages (from-to)302-308
JournalJournal of vacuum science & technology / A (JVST)
VolumeA26
DOIs
Publication statusPublished - 2008