Oxidation and diffusion processes during annealing of AlCrVN hard coatings
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In: Journal of vacuum science & technology / A (JVST), Vol. A26, 2008, p. 302-308.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Oxidation and diffusion processes during annealing of AlCrVN hard coatings
AU - Franz, Robert
AU - Neidhardt, Jörg
AU - Mitterer, Christian
AU - Schaffer, B.
AU - Hutter, H.
AU - Kaindl, R.
AU - Sartory, Bernhard
AU - Tessadri, Richard
AU - Lechthaler, Markus
AU - Polcik, Peter
PY - 2008
Y1 - 2008
U2 - 10.116/1.2841508
DO - 10.116/1.2841508
M3 - Article
VL - A26
SP - 302
EP - 308
JO - Journal of vacuum science & technology / A (JVST)
JF - Journal of vacuum science & technology / A (JVST)
SN - 0734-2101
ER -