Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target
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| Translated title of the contribution | Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target |
|---|---|
| Original language | English |
| Pages (from-to) | 063304-1-063304-10 |
| Journal | Journal of applied physics |
| Volume | 104 |
| DOIs | |
| Publication status | Published - 2008 |
