Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target
Research output: Contribution to journal › Article › Research › peer-review
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Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target. / Neidhardt, Jörg; Mraz, S.; Schneider, J.M. et al.
In: Journal of applied physics, Vol. 104, 2008, p. 063304-1-063304-10.
In: Journal of applied physics, Vol. 104, 2008, p. 063304-1-063304-10.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Neidhardt, J, Mraz, S, Schneider, JM, Strub, E, Bohne, W, Liedke, B, Möller, W & Mitterer, C 2008, 'Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target', Journal of applied physics, vol. 104, pp. 063304-1-063304-10. https://doi.org/10.1063/1.2978211
APA
Neidhardt, J., Mraz, S., Schneider, J. M., Strub, E., Bohne, W., Liedke, B., Möller, W., & Mitterer, C. (2008). Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target. Journal of applied physics, 104, 063304-1-063304-10. https://doi.org/10.1063/1.2978211
Vancouver
Neidhardt J, Mraz S, Schneider JM, Strub E, Bohne W, Liedke B et al. Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target. Journal of applied physics. 2008;104:063304-1-063304-10. doi: 10.1063/1.2978211
Author
Bibtex - Download
@article{bded4a93c6844f5db9efd98191d05d32,
title = "Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target",
author = "J{\"o}rg Neidhardt and S. Mraz and J.M. Schneider and E. Strub and W. Bohne and B. Liedke and W. M{\"o}ller and Christian Mitterer",
year = "2008",
doi = "10.1063/1.2978211",
language = "English",
volume = "104",
pages = "063304--1--063304--10",
journal = "Journal of applied physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target
AU - Neidhardt, Jörg
AU - Mraz, S.
AU - Schneider, J.M.
AU - Strub, E.
AU - Bohne, W.
AU - Liedke, B.
AU - Möller, W.
AU - Mitterer, Christian
PY - 2008
Y1 - 2008
U2 - 10.1063/1.2978211
DO - 10.1063/1.2978211
M3 - Article
VL - 104
SP - 063304-1-063304-10
JO - Journal of applied physics
JF - Journal of applied physics
SN - 0021-8979
ER -
