Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target

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Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target. / Neidhardt, Jörg; Mraz, S.; Schneider, J.M. et al.
In: Journal of applied physics, Vol. 104, 2008, p. 063304-1-063304-10.

Research output: Contribution to journalArticleResearchpeer-review

Vancouver

Neidhardt J, Mraz S, Schneider JM, Strub E, Bohne W, Liedke B et al. Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target. Journal of applied physics. 2008;104:063304-1-063304-10. doi: 10.1063/1.2978211

Bibtex - Download

@article{bded4a93c6844f5db9efd98191d05d32,
title = "Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target",
author = "J{\"o}rg Neidhardt and S. Mraz and J.M. Schneider and E. Strub and W. Bohne and B. Liedke and W. M{\"o}ller and Christian Mitterer",
year = "2008",
doi = "10.1063/1.2978211",
language = "English",
volume = "104",
pages = "063304--1--063304--10",
journal = "Journal of applied physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target

AU - Neidhardt, Jörg

AU - Mraz, S.

AU - Schneider, J.M.

AU - Strub, E.

AU - Bohne, W.

AU - Liedke, B.

AU - Möller, W.

AU - Mitterer, Christian

PY - 2008

Y1 - 2008

U2 - 10.1063/1.2978211

DO - 10.1063/1.2978211

M3 - Article

VL - 104

SP - 063304-1-063304-10

JO - Journal of applied physics

JF - Journal of applied physics

SN - 0021-8979

ER -