Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target
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in: Journal of applied physics, Jahrgang 104, 2008, S. 063304-1-063304-10.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target
AU - Neidhardt, Jörg
AU - Mraz, S.
AU - Schneider, J.M.
AU - Strub, E.
AU - Bohne, W.
AU - Liedke, B.
AU - Möller, W.
AU - Mitterer, Christian
PY - 2008
Y1 - 2008
U2 - 10.1063/1.2978211
DO - 10.1063/1.2978211
M3 - Article
VL - 104
SP - 063304-1-063304-10
JO - Journal of applied physics
JF - Journal of applied physics
SN - 0021-8979
ER -