Oxidation behavior of arc evaporated Al-Cr-Si-N thin films
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| Translated title of the contribution | Oxidation behavior of arc evaporated Al-Cr-Si-N thin films |
|---|---|
| Original language | English |
| Pages (from-to) | 061501-1-061501-6 |
| Journal | Journal of vacuum science & technology / A (JVST) |
| Volume | 30 |
| Publication status | Published - 2012 |
