Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
Research output: Contribution to journal › Article › Research › peer-review
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- Technische Universität Graz
Details
| Original language | English |
|---|---|
| Article number | 01A109 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 36 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1 Jan 2018 |
