Thermal stability and thermo-mechanical properties of magnetron sputtered Cr-Al-Y-N coatings

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Translated title of the contributionThermal stability and thermo-mechanical properties of magnetron sputtered Cr-Al-Y-N coatings
Original languageEnglish
Pages (from-to)29-35
JournalJournal of vacuum science & technology / A (JVST)
VolumeA26
DOIs
Publication statusPublished - 2008