Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101
11 - 20 out of 28Page size: 10

Research output

  1. 2018
  2. Published

    Oxidation and wet etching behavior of sputtered Mo-Ti-Al films

    Jörg, T., Hofer-Roblyek, A. M., Köstenbauer, H., Winkler, J. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, p. 021513-1-021513-5

    Research output: Contribution to journal › Article › Research › peer-review

  3. 2017
  4. Published

    Tailoring age hardening of Ti1-xAlxN by Ta alloying

    Großmann, B., Jamnig, A., Schalk, N., Czettl, C., Pohler, M. & Mitterer, C., 13 Sept 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6, 6 p., 060604.

    Research output: Contribution to journal › Article › Research › peer-review

  5. Published

    Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

    Lorenz, R., O'Sullivan, M., Sprenger, D., Lang, B. & Mitterer, C., 18 May 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6 p., 041504.

    Research output: Contribution to journal › Article › Research › peer-review

  6. Published

    Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

    Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A. & Mitterer, C., 4 Jan 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 2, 8 p., 021504.

    Research output: Contribution to journal › Article › Research › peer-review

  7. 2016
  8. Published

    Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 1 Jul 2016, In: Journal of vacuum science & technology / A (JVST). 34.2016, 4, 8 p., 041517.

    Research output: Contribution to journal › Article › Research › peer-review

  9. Published

    Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

    Franz, R., Mendez Martin, F., Hawranek, G. & Polcik, P., 2016, In: Journal of vacuum science & technology / A (JVST). Vol. 34, No. 2, p. 1-8 8 p.

    Research output: Contribution to journal › Article › Research › peer-review

  10. 2012
  11. Published

    Oxidation behavior of arc evaporated Al-Cr-Si-N thin films

    Tritremmel, C., Daniel, R., Mitterer, C., Mayrhofer, P. H., Lechthaler, M. & Polcik, P., 2012, In: Journal of vacuum science & technology / A (JVST). 30, p. 061501-1-061501-6

    Research output: Contribution to journal › Article › Research › peer-review

  12. 2011
  13. Published

    Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

    Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C. & Mitterer, C., Jul 2011, In: Journal of vacuum science & technology / A (JVST). 29, 4, 041506.

    Research output: Contribution to journal › Article › Research › peer-review

  14. Published

    Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings

    Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C. & Mitterer, C., 2011, In: Journal of vacuum science & technology / A (JVST). p. 0415061-0415068

    Research output: Contribution to journal › Article › Research › peer-review

  15. 2010
  16. Published

    Investigation on structure and properties of arc-evaporated HfAIN hard coatings

    Franz, R., Mitterer, C., Lechthaler, M. & Polzer, C., 2010, In: Journal of vacuum science & technology / A (JVST). p. 528-535

    Research output: Contribution to journal › Article › Research › peer-review

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