Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101
11 - 20 out of 27Page size: 10

Research output

  1. 2017
  2. Published

    Tailoring age hardening of Ti1-xAlxN by Ta alloying

    Großmann, B., Jamnig, A., Schalk, N., Czettl, C., Pohler, M. & Mitterer, C., 13 Sept 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6, 6 p., 060604.

    Research output: Contribution to journal › Article › Research › peer-review

  3. Published

    Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

    Lorenz, R., O'Sullivan, M., Sprenger, D., Lang, B. & Mitterer, C., 18 May 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6 p., 041504.

    Research output: Contribution to journal › Article › Research › peer-review

  4. Published

    Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

    Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A. & Mitterer, C., 4 Jan 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 2, 8 p., 021504.

    Research output: Contribution to journal › Article › Research › peer-review

  5. 2016
  6. Published

    Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 1 Jul 2016, In: Journal of vacuum science & technology / A (JVST). 34.2016, 4, 8 p., 041517.

    Research output: Contribution to journal › Article › Research › peer-review

  7. Published

    Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

    Franz, R., Mendez Martin, F., Hawranek, G. & Polcik, P., 2016, In: Journal of vacuum science & technology / A (JVST). Vol. 34, No. 2, p. 1-8 8 p.

    Research output: Contribution to journal › Article › Research › peer-review

  8. 2012
  9. Published

    Oxidation behavior of arc evaporated Al-Cr-Si-N thin films

    Tritremmel, C., Daniel, R., Mitterer, C., Mayrhofer, P. H., Lechthaler, M. & Polcik, P., 2012, In: Journal of vacuum science & technology / A (JVST). 30, p. 061501-1-061501-6

    Research output: Contribution to journal › Article › Research › peer-review

  10. 2011
  11. Published

    Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

    Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C. & Mitterer, C., Jul 2011, In: Journal of vacuum science & technology / A (JVST). 29, 4, 041506.

    Research output: Contribution to journal › Article › Research › peer-review

  12. Published

    Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings

    Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C. & Mitterer, C., 2011, In: Journal of vacuum science & technology / A (JVST). p. 0415061-0415068

    Research output: Contribution to journal › Article › Research › peer-review

  13. 2010
  14. Published

    Investigation on structure and properties of arc-evaporated HfAIN hard coatings

    Franz, R., Mitterer, C., Lechthaler, M. & Polzer, C., 2010, In: Journal of vacuum science & technology / A (JVST). p. 528-535

    Research output: Contribution to journal › Article › Research › peer-review

  15. 2009
  16. Published

    On the effect of Ta on improved oxidation resistance of Ti-Al-Ta-N coatings

    Pfeiler, M., Scheu, C., Hutter, H., Schnöller, J., Michotte, C., Mitterer, C. & Kathrein, M., 2009, In: Journal of vacuum science & technology / A (JVST). 27, p. 554-560

    Research output: Contribution to journal › Article › Research › peer-review

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