Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101
11 - 20 out of 26Page size: 10

Research output

  1. 2017
  2. Published

    Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

    Lorenz, R., O'Sullivan, M., Sprenger, D., Lang, B. & Mitterer, C., 18 May 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6 p., 041504.

    Research output: Contribution to journal › Article › Research › peer-review

  3. Published

    Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

    Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A. & Mitterer, C., 4 Jan 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 2, 8 p., 021504.

    Research output: Contribution to journal › Article › Research › peer-review

  4. 2016
  5. Published

    Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 1 Jul 2016, In: Journal of vacuum science & technology / A (JVST). 34.2016, 4, 8 p., 041517.

    Research output: Contribution to journal › Article › Research › peer-review

  6. Published

    Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

    Franz, R., Mendez Martin, F., Hawranek, G. & Polcik, P., 2016, In: Journal of vacuum science & technology / A (JVST). Vol. 34, No. 2, p. 1-8 8 p.

    Research output: Contribution to journal › Article › Research › peer-review

  7. 2012
  8. Published

    Oxidation behavior of arc evaporated Al-Cr-Si-N thin films

    Tritremmel, C., Daniel, R., Mitterer, C., Mayrhofer, P. H., Lechthaler, M. & Polcik, P., 2012, In: Journal of vacuum science & technology / A (JVST). 30, p. 061501-1-061501-6

    Research output: Contribution to journal › Article › Research › peer-review

  9. 2011
  10. Published

    Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

    Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C. & Mitterer, C., Jul 2011, In: Journal of vacuum science & technology / A (JVST). 29, 4, 041506.

    Research output: Contribution to journal › Article › Research › peer-review

  11. Published

    Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings

    Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C. & Mitterer, C., 2011, In: Journal of vacuum science & technology / A (JVST). p. 0415061-0415068

    Research output: Contribution to journal › Article › Research › peer-review

  12. 2010
  13. Published

    Investigation on structure and properties of arc-evaporated HfAIN hard coatings

    Franz, R., Mitterer, C., Lechthaler, M. & Polzer, C., 2010, In: Journal of vacuum science & technology / A (JVST). p. 528-535

    Research output: Contribution to journal › Article › Research › peer-review

  14. 2009
  15. Published

    On the effect of Ta on improved oxidation resistance of Ti-Al-Ta-N coatings

    Pfeiler, M., Scheu, C., Hutter, H., Schnöller, J., Michotte, C., Mitterer, C. & Kathrein, M., 2009, In: Journal of vacuum science & technology / A (JVST). 27, p. 554-560

    Research output: Contribution to journal › Article › Research › peer-review

  16. 2008
  17. Published

    Oxidation and diffusion processes during annealing of AlCrVN hard coatings

    Franz, R., Neidhardt, J., Mitterer, C., Schaffer, B., Hutter, H., Kaindl, R., Sartory, B., Tessadri, R., Lechthaler, M. & Polcik, P., 2008, In: Journal of vacuum science & technology / A (JVST). A26, p. 302-308

    Research output: Contribution to journal › Article › Research › peer-review

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