Christian Saringer

Research output

  1. 2017
  2. Published

    Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power

    Saringer, C., Pajdarova, A. D., Baroch, P., Zorn, K., Franz, R. & Mitterer, C., 2017.

    Research output: Contribution to conferencePosterResearchpeer-review

  3. Published
  4. 2016
  5. Published

    Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 14 Sept 2016.

    Research output: Contribution to conferencePosterResearch

  6. Published

    Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 1 Jul 2016, In: Journal of vacuum science & technology / A (JVST). 34.2016, 4, 8 p., 041517.

    Research output: Contribution to journalArticleResearchpeer-review

  7. 2015
  8. Published
  9. Published
  10. Published

    Restrictions of wafer curvature stress measurements by thermally induced plastic substrate deformation

    Saringer, C., Tkadletz, M. & Mitterer, C., 2015.

    Research output: Contribution to conferencePresentationResearchpeer-review

  11. 2014
  12. Published
  13. Published

    Funktionale Schichten für das Automobil

    Mitterer, C., Saringer, C., Franz, R., Jantschner, O., Terziyska, V. & Daniel, R., 2014.

    Research output: Contribution to conferencePosterResearchpeer-review

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