The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings
Research output: Contribution to conference › Poster › Research
Authors
Organisational units
Details
| Original language | English |
|---|---|
| Publication status | Published - Dec 2015 |
| Event | MIATEC RSD 2015 - CNAM, Paris, France Duration: 8 Dec 2015 → 11 Dec 2015 |
Conference
| Conference | MIATEC RSD 2015 |
|---|---|
| Country/Territory | France |
| City | Paris |
| Period | 8/12/15 → 11/12/15 |
