Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power

Research output: Contribution to conferencePosterResearchpeer-review

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Details

Original languageEnglish
Publication statusPublished - 2017
Event44th IOP Plasma Physics Conference - Worcester College, Oxford, United Kingdom
Duration: 3 Apr 20176 Apr 2017

Conference

Conference44th IOP Plasma Physics Conference
Country/TerritoryUnited Kingdom
CityOxford
Period3/04/176/04/17