Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power
Research output: Contribution to conference › Poster › Research
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Details
| Original language | English |
|---|---|
| Publication status | Published - 14 Sept 2016 |
| Event | 15th International Conference on Plasma Surface Engineering - Kongresshaus, Garmisch-Partenkirchen, Germany Duration: 12 Sept 2016 → 16 Sept 2016 |
Conference
| Conference | 15th International Conference on Plasma Surface Engineering |
|---|---|
| Abbreviated title | PSE 2016 |
| Country/Territory | Germany |
| City | Garmisch-Partenkirchen |
| Period | 12/09/16 → 16/09/16 |
