Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power
Research output: Contribution to conference › Poster › Research
Standard
Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power. / Saringer, Christian; Franz, Robert; Zorn, Katrin et al.
2016. Poster session presented at 15th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany.
2016. Poster session presented at 15th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany.
Research output: Contribution to conference › Poster › Research
Harvard
Saringer, C, Franz, R, Zorn, K & Mitterer, C 2016, 'Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power', 15th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, 12/09/16 - 16/09/16.
APA
Saringer, C., Franz, R., Zorn, K., & Mitterer, C. (2016). Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power. Poster session presented at 15th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany.
Vancouver
Saringer C, Franz R, Zorn K, Mitterer C. Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power. 2016. Poster session presented at 15th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany.
Author
Bibtex - Download
@conference{f5d93ffa95f84e45b8ffa16f1f2e958a,
title = "Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power",
author = "Christian Saringer and Robert Franz and Katrin Zorn and Christian Mitterer",
year = "2016",
month = sep,
day = "14",
language = "English",
note = "15th International Conference on Plasma Surface Engineering ; Conference date: 12-09-2016 Through 16-09-2016",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power
AU - Saringer, Christian
AU - Franz, Robert
AU - Zorn, Katrin
AU - Mitterer, Christian
PY - 2016/9/14
Y1 - 2016/9/14
M3 - Poster
T2 - 15th International Conference on Plasma Surface Engineering
Y2 - 12 September 2016 through 16 September 2016
ER -
