Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power

Research output: Contribution to conference › Poster › Research

1 - 1 out of 1Page size: 10
Sort by: Start date

Activities

  1. 2016

  2. 15th International Conference on Plasma Surface Engineering

    Christian Saringer (Participant)

    11 Sept 2016 → 16 Sept 2016

    Activity: Participating in or organising an event › Participation in conference

View graph of relations

SFX

Publication SFX