Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power

Research output: Contribution to conference › Poster › Research

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  1. 2016

  2. 15th International Conference on Plasma Surface Engineering

    Christian Saringer (Participant)

    11 Sept 2016 → 16 Sept 2016

    Activity: Participating in or organising an event › Participation in conference

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