Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates
Research output: Contribution to journal › Article › Research › peer-review
Authors
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External Organisational units
- Materials Center Leoben Forschungs GmbH
Details
| Translated title of the contribution | Limitierung der Spannungsmessung durch die Biegebalknemethode auf Grund thermisch aktivierter plastischer Verformung der Siliziumsubstrate |
|---|---|
| Original language | English |
| Pages (from-to) | 68-75 |
| Number of pages | 8 |
| Journal | Surface & coatings technology |
| Volume | 274 |
| Publication status | Published - 25 Jul 2015 |
