Restrictions of wafer curvature stress measurements by thermally induced plastic substrate deformation
Research output: Contribution to conference › Presentation › Research › peer-review
Authors
Organisational units
External Organisational units
- Materials Center Leoben Forschungs GmbH
Details
| Original language | English |
|---|---|
| Publication status | Published - 2015 |
| Event | E-MRS Spring Meeting 2015 - Lille, France Duration: 11 May 2015 → 15 May 2015 |
Conference
| Conference | E-MRS Spring Meeting 2015 |
|---|---|
| Country/Territory | France |
| City | Lille |
| Period | 11/05/15 → 15/05/15 |
