Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers

Matoy, K., Schönherr, H., Detzel, T. & Dehm, G., 2010, In: Thin solid films. 518, p. 5796-5801

Research output: Contribution to journal › Article › Research › peer-review

A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

Matoy, K., Schönherr, H., Detzel, T., Schöberl, T., Pippan, R., Motz, C. & Dehm, G., 2009, In: Thin solid films. 518, p. 247-256

Research output: Contribution to journal › Article › Research › peer-review

Recent developments in surface science and engineering, thin films, nanoscience, biomaterials, plasma science, and vacuum technology

Mozetic, M., Vesel, A., Primc, G., Eisenmenger-Sittner, C., Bauer, J., Eder, A., Schmid, G. H. S., Ruzic, D. N., Ahmed, Z., Barker, D., Douglass, K. O., Eckel, S., Fedchak, J. A., Hendricks, J., Klimov, N., Ricker, J., Scherschligt, J., Stone, J., Strouse, G. & Capan, I. & 31 others, Buljan, M., Milosevic, S., Teichert, C., Cohen, S. R., Silva, A. G., Lehocky, M., Humpolicek, P., Rodriguez, C., Hernandez-Montelongo, J., Mercier, D., Manso-Silvan, M., Ceccone, G., Galtayries, A., Stana-Kleinschek, K., Petrov, I., Greene, J. E., Avila, J., Chen, C. Y., Caja-Munoz, B., Yi, H., Boury, A., Lorcy, S., Asensio, M. C., Bredin, J., Gans, T., O'Connell, D., Brendin, J., Reniers, F., Vincze, A., Anderle, M. & Montelius, L., 30 Aug 2018, In: Thin solid films. 660, p. 120-160

Research output: Contribution to journal › Review article › peer-review

Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography

Mühlbacher, M., Mendez Martin, F., Sartory, B., Schalk, N., Keckes, J., Lu, J., Hultman, L. & Mitterer, C., 2015, In: Thin solid films. 574, p. 103-109

Research output: Contribution to journal › Article › Research › peer-review

Patterned immobilisation of silicon dioxide nanoparticles on the surface of a photosensitive polymer

Muhr, N., Kern, W. & Grießer, T., 2012, In: Thin solid films. 520, p. 1789-1793

Research output: Contribution to journal › Article › Research › peer-review

Structure and properties of magnetron sputtered Zr-Si-N films with a high (≥25 at.%) Si content

Musil, J., Daniel, R., Zeman, P. & Takai, O., 2005, In: Thin solid films.

Research output: Contribution to journal › Article › Research › peer-review

Nanoindentation Response of High Performance Fullerene-Like CNx

Neidhardt, J., Palacio, J. F., Bull, S. J. & Hultman, L., 2006, In: Thin solid films. 494, p. 63-68

Research output: Contribution to journal › Article › Research › peer-review

Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit

Paulitsch, J., Schenkel, M., Zufraß, T., Mayrhofer, P. H. & Münz, W.-D., 2010, In: Thin solid films. 518, p. 5558-5564

Research output: Contribution to journal › Article › Research › peer-review

Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique

Paulitsch, J., Schenkel, M., Schintlmeister, A., Hutter, H. & Mayrhofer, P. H., 2010, In: Thin solid films. 518, p. 5553-5557

Research output: Contribution to journal › Article › Research › peer-review

Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique

Paulitsch, J., Mayrhofer, P. H., Münz, W.-D. & Schenkel, M., 2008, In: Thin solid films. 517, p. 1239-1244

Research output: Contribution to journal › Article › Research › peer-review