Structure and properties of magnetron sputtered Zr-Si-N films with a high (≥25 at.%) Si content

Research output: Contribution to journal › Article › Research › peer-review

Authors

J. Musil
R. Daniel
P. Zeman
O. Takai

Organisational units

Chair of Physical Metallurgy (420)

Details

Original language	English
Journal	Thin solid films
DOIs	https://doi.org/10.1016/j.tsf.2004.11.190
Publication status	Published - 2005

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