A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films
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| Translated title of the contribution | A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films |
|---|---|
| Original language | English |
| Pages (from-to) | 247-256 |
| Journal | Thin solid films |
| Volume | 518 |
| Publication status | Published - 2009 |
