A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films
Research output: Contribution to journal › Article › Research › peer-review
Standard
A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. / Matoy, K.; Schönherr, H.; Detzel, T. et al.
In: Thin solid films, Vol. 518, 2009, p. 247-256.
In: Thin solid films, Vol. 518, 2009, p. 247-256.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Matoy, K, Schönherr, H, Detzel, T, Schöberl, T, Pippan, R, Motz, C & Dehm, G 2009, 'A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films', Thin solid films, vol. 518, pp. 247-256.
APA
Matoy, K., Schönherr, H., Detzel, T., Schöberl, T., Pippan, R., Motz, C., & Dehm, G. (2009). A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. Thin solid films, 518, 247-256.
Vancouver
Matoy K, Schönherr H, Detzel T, Schöberl T, Pippan R, Motz C et al. A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. Thin solid films. 2009;518:247-256.
Author
Bibtex - Download
@article{a7ef94f3548f422389c2585b219eff9c,
title = "A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films",
author = "K. Matoy and H. Sch{\"o}nherr and T. Detzel and Thomas Sch{\"o}berl and Reinhard Pippan and Christian Motz and Gerhard Dehm",
year = "2009",
language = "English",
volume = "518",
pages = "247--256",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films
AU - Matoy, K.
AU - Schönherr, H.
AU - Detzel, T.
AU - Schöberl, Thomas
AU - Pippan, Reinhard
AU - Motz, Christian
AU - Dehm, Gerhard
PY - 2009
Y1 - 2009
M3 - Article
VL - 518
SP - 247
EP - 256
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -
