Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit

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Translated title of the contribution	Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit
Original language	English
Pages (from-to)	5558-5564
Journal	Thin solid films
Volume	518
DOIs	https://doi.org/10.1016/j.tsf.2010.05.062
Publication status	Published - 2010