Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique

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Translated title of the contributionStructure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique
Original languageEnglish
Pages (from-to)1239-1244
JournalThin solid films
Volume517
DOIs
Publication statusPublished - 2008