Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique

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Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique. / Paulitsch, Jörg; Mayrhofer, Paul Heinz; Münz, W.-D. et al.
In: Thin solid films, Vol. 517, 2008, p. 1239-1244.

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@article{01af0ea08a2d447093a3a15726798f83,
title = "Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique",
author = "J{\"o}rg Paulitsch and Mayrhofer, {Paul Heinz} and W.-D. M{\"u}nz and M. Schenkel",
year = "2008",
doi = "10.1016/j.tsf.2008.06.080",
language = "English",
volume = "517",
pages = "1239--1244",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

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TY - JOUR

T1 - Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique

AU - Paulitsch, Jörg

AU - Mayrhofer, Paul Heinz

AU - Münz, W.-D.

AU - Schenkel, M.

PY - 2008

Y1 - 2008

U2 - 10.1016/j.tsf.2008.06.080

DO - 10.1016/j.tsf.2008.06.080

M3 - Article

VL - 517

SP - 1239

EP - 1244

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -