Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers

Matoy, K., Schönherr, H., Detzel, T. & Dehm, G., 2010, in: Thin solid films. 518, S. 5796-5801

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A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

Matoy, K., Schönherr, H., Detzel, T., Schöberl, T., Pippan, R., Motz, C. & Dehm, G., 2009, in: Thin solid films. 518, S. 247-256

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Recent developments in surface science and engineering, thin films, nanoscience, biomaterials, plasma science, and vacuum technology

Mozetic, M., Vesel, A., Primc, G., Eisenmenger-Sittner, C., Bauer, J., Eder, A., Schmid, G. H. S., Ruzic, D. N., Ahmed, Z., Barker, D., Douglass, K. O., Eckel, S., Fedchak, J. A., Hendricks, J., Klimov, N., Ricker, J., Scherschligt, J., Stone, J., Strouse, G. & Capan, I. &31 mehr, Buljan, M., Milosevic, S., Teichert, C., Cohen, S. R., Silva, A. G., Lehocky, M., Humpolicek, P., Rodriguez, C., Hernandez-Montelongo, J., Mercier, D., Manso-Silvan, M., Ceccone, G., Galtayries, A., Stana-Kleinschek, K., Petrov, I., Greene, J. E., Avila, J., Chen, C. Y., Caja-Munoz, B., Yi, H., Boury, A., Lorcy, S., Asensio, M. C., Bredin, J., Gans, T., O'Connell, D., Brendin, J., Reniers, F., Vincze, A., Anderle, M. & Montelius, L., 30 Aug. 2018, in: Thin solid films. 660, S. 120-160

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Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography

Mühlbacher, M., Mendez Martin, F., Sartory, B., Schalk, N., Keckes, J., Lu, J., Hultman, L. & Mitterer, C., 2015, in: Thin solid films. 574, S. 103-109

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Patterned immobilisation of silicon dioxide nanoparticles on the surface of a photosensitive polymer

Muhr, N., Kern, W. & Grießer, T., 2012, in: Thin solid films. 520, S. 1789-1793

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Structure and properties of magnetron sputtered Zr-Si-N films with a high (≥25 at.%) Si content

Musil, J., Daniel, R., Zeman, P. & Takai, O., 2005, in: Thin solid films.

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Nanoindentation Response of High Performance Fullerene-Like CNx

Neidhardt, J., Palacio, J. F., Bull, S. J. & Hultman, L., 2006, in: Thin solid films. 494, S. 63-68

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Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit

Paulitsch, J., Schenkel, M., Zufraß, T., Mayrhofer, P. H. & Münz, W.-D., 2010, in: Thin solid films. 518, S. 5558-5564

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Low Friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique

Paulitsch, J., Schenkel, M., Schintlmeister, A., Hutter, H. & Mayrhofer, P. H., 2010, in: Thin solid films. 518, S. 5553-5557

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Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique

Paulitsch, J., Mayrhofer, P. H., Münz, W.-D. & Schenkel, M., 2008, in: Thin solid films. 517, S. 1239-1244

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