Research output

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  1. 2018
  2. Published

    Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum

    Zöhrer, S., Anders, A. & Franz, R., 2018, In: Plasma sources science & technology. p. 1-17

    Research output: Contribution to journal › Article › Research › peer-review

  3. 2017
  4. E-pub ahead of print

    A correlative experimental and ab initio approach to improve the fracture behavior of Mo thin films by alloying with Cu

    Jörg, T., Music, D., Cordill, M., Franz, R., Köstenbauer, H., Linke, C., Winkler, J., Schneider, J. M. & Mitterer, C., 25 Sept 2017, (E-pub ahead of print) In: Applied physics letters. 111.2017, 13, p. 134101-1-134101-4

    Research output: Contribution to journal › Article › Research › peer-review

  5. E-pub ahead of print

    Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets

    Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A., Mitterer, S. & Mitterer, C., 18 Sept 2017, (E-pub ahead of print) In: Surface & coatings technology. 332.2017, 25 December, p. 80-85 6 p.

    Research output: Contribution to journal › Article › Research › peer-review

  6. Published

    Electro-mechanical behavior of sputter-deposited molybdenum-aluminum multilayers

    Kreiml, P., Rausch, M., Franz, R., Winkler, J., Mitterer, C. & Cordill, M. J., 11 Sept 2017.

    Research output: Contribution to conference › Poster › Research › peer-review

  7. Published

    Deformation behavior of Re alloyed Mo thin films on flexible substrates: In situ fragmentation analysis supported by first-principles calculations

    Jörg, T., Music, D., Hauser, F., Cordill, M., Franz, R., Köstenbauer, H., Winkler, J., Schneider, J. M. & Mitterer, C., 7 Aug 2017, In: Scientific reports (London : Nature Publishing Group). 2017, 7, 10 p., 7374.

    Research output: Contribution to journal › Article › Research › peer-review

  8. Published

    Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

    Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A. & Mitterer, C., 4 Jan 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 2, 8 p., 021504.

    Research output: Contribution to journal › Article › Research › peer-review

  9. Published

    Spatial distribution of plasma properties in a dc-magnetron discharge and influence of the discharge power

    Saringer, C., Pajdarova, A. D., Baroch, P., Zorn, K., Franz, R. & Mitterer, C., 2017.

    Research output: Contribution to conference › Poster › Research › peer-review

  10. 2016
  11. Published

    Comparison of reactive magnetron sputter deposition of TiNx and TiOx as a function of the discharge power

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 14 Sept 2016.

    Research output: Contribution to conference › Poster › Research

  12. Published

    Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 1 Jul 2016, In: Journal of vacuum science & technology / A (JVST). 34.2016, 4, 8 p., 041517.

    Research output: Contribution to journal › Article › Research › peer-review

  13. Published

    Electro-Mechanical Behaviorof Single and Multilayer Metal Thin Films on Polymer Substrates

    Jörg, T., Cordill, M., Franz, R., Kirchlechner, C., Winkler, J. & Mitterer, C., 2016.

    Research output: Contribution to conference › Presentation › Research

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