Plasma sources science & technology, ‎0963-0252

Journal

ISSNs0963-0252
1 - 5 out of 5Page size: 10

Research output

  1. 2020
  2. Published

    Erosion and cathodic arc plasma of Nb–Al cathodes: composite versus intermetallic

    Zöhrer, S., Golizadeh Najafabadi, M., Koutná, N., Holec, D., Anders, A. & Franz, R., 20 Feb 2020, In: Plasma sources science & technology. 29.2020, 2, 14 p., 025022.

    Research output: Contribution to journal › Article › Research › peer-review

  3. 2018
  4. Published

    Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum

    Zöhrer, S., Anders, A. & Franz, R., 2018, In: Plasma sources science & technology. p. 1-17

    Research output: Contribution to journal › Article › Research › peer-review

  5. 2016
  6. Published

    Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOx film growth

    Franz, R., Clavero, C., Anders, A. & Kolbeck, J., 2016, In: Plasma sources science & technology. 25, p. 1-11 11 p.

    Research output: Contribution to journal › Article › Research › peer-review

  7. 2014
  8. Published

    Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons

    Panjan, M., Franz, R. & Anders, A., 2014, In: Plasma sources science & technology. 23, p. 0250071-02500712

    Research output: Contribution to journal › Article › Research › peer-review

  9. Published

    Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target

    Franz, R., Clavero, C., Bolat, R., Mendelsberg, R. & Anders, A., 2014, In: Plasma sources science & technology. 23, p. 0350011-03500111

    Research output: Contribution to journal › Article › Research › peer-review

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