Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Bn-Al cathodes in high vacuum
Research output: Contribution to journal › Article › Research › peer-review
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- Lawrence Berkeley National Laboratory
Details
Original language | English |
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Pages (from-to) | 1-17 |
Journal | Plasma sources science & technology |
DOIs | |
Publication status | Published - 2018 |