Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Lawrence Berkeley National Laboratory
- Leibniz-Institut für Oberflächenmodifizierung
Details
Original language | English |
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Pages (from-to) | 0552011-05520114 |
Journal | Journal of physics / D, Applied physics |
DOIs | |
Publication status | Published - 2018 |