Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution

Research output: Contribution to journalArticleResearchpeer-review

Authors

External Organisational units

  • Lawrence Berkeley National Laboratory
  • Leibniz-Institut für Oberflächenmodifizierung

Details

Original languageEnglish
Pages (from-to)0552011-05520114
JournalJournal of physics / D, Applied physics
DOIs
Publication statusPublished - 2018