Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons
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| Translated title of the contribution | Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons |
|---|---|
| Original language | English |
| Pages (from-to) | 0250071-02500712 |
| Journal | Plasma sources science & technology |
| Volume | 23 |
| DOIs | |
| Publication status | Published - 2014 |
