Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target
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| Translated title of the contribution | Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target |
|---|---|
| Original language | English |
| Pages (from-to) | 0350011-03500111 |
| Journal | Plasma sources science & technology |
| Volume | 23 |
| DOIs | |
| Publication status | Published - 2014 |
