Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target
Research output: Contribution to journal › Article › Research › peer-review
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Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target. / Franz, Robert; Clavero, César; Bolat, Rustem et al.
In: Plasma sources science & technology, Vol. 23, 2014, p. 0350011-03500111.
In: Plasma sources science & technology, Vol. 23, 2014, p. 0350011-03500111.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Franz, R, Clavero, C, Bolat, R, Mendelsberg, R & Anders, A 2014, 'Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target', Plasma sources science & technology, vol. 23, pp. 0350011-03500111. https://doi.org/10.1088/0963-0252/23/3/035001
APA
Franz, R., Clavero, C., Bolat, R., Mendelsberg, R., & Anders, A. (2014). Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target. Plasma sources science & technology, 23, 0350011-03500111. https://doi.org/10.1088/0963-0252/23/3/035001
Vancouver
Franz R, Clavero C, Bolat R, Mendelsberg R, Anders A. Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target. Plasma sources science & technology. 2014;23:0350011-03500111. doi: 10.1088/0963-0252/23/3/035001
Author
Bibtex - Download
@article{d1e1d4c4a68d477484b1edcb09287e3e,
title = "Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target",
author = "Robert Franz and C{\'e}sar Clavero and Rustem Bolat and Rueben Mendelsberg and A. Anders",
year = "2014",
doi = "10.1088/0963-0252/23/3/035001",
language = "English",
volume = "23",
pages = "0350011--03500111",
journal = "Plasma sources science & technology",
issn = "0963-0252",
publisher = "IOP Publishing Ltd.",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target
AU - Franz, Robert
AU - Clavero, César
AU - Bolat, Rustem
AU - Mendelsberg, Rueben
AU - Anders, A.
PY - 2014
Y1 - 2014
U2 - 10.1088/0963-0252/23/3/035001
DO - 10.1088/0963-0252/23/3/035001
M3 - Article
VL - 23
SP - 350011
EP - 3500111
JO - Plasma sources science & technology
JF - Plasma sources science & technology
SN - 0963-0252
ER -
