Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Standard
in: Plasma sources science & technology, Jahrgang 23, 2014, S. 0350011-03500111.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
APA
Vancouver
Author
Bibtex - Download
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target
AU - Franz, Robert
AU - Clavero, César
AU - Bolat, Rustem
AU - Mendelsberg, Rueben
AU - Anders, A.
PY - 2014
Y1 - 2014
U2 - 10.1088/0963-0252/23/3/035001
DO - 10.1088/0963-0252/23/3/035001
M3 - Article
VL - 23
SP - 350011
EP - 3500111
JO - Plasma sources science & technology
JF - Plasma sources science & technology
SN - 0963-0252
ER -