Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target. / Franz, Robert; Clavero, César; Bolat, Rustem et al.
in: Plasma sources science & technology, Jahrgang 23, 2014, S. 0350011-03500111.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Bibtex - Download

@article{d1e1d4c4a68d477484b1edcb09287e3e,
title = "Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target",
author = "Robert Franz and C{\'e}sar Clavero and Rustem Bolat and Rueben Mendelsberg and A. Anders",
year = "2014",
doi = "10.1088/0963-0252/23/3/035001",
language = "English",
volume = "23",
pages = "0350011--03500111",
journal = "Plasma sources science & technology",
issn = "0963-0252",
publisher = "IOP Publishing Ltd.",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6 target

AU - Franz, Robert

AU - Clavero, César

AU - Bolat, Rustem

AU - Mendelsberg, Rueben

AU - Anders, A.

PY - 2014

Y1 - 2014

U2 - 10.1088/0963-0252/23/3/035001

DO - 10.1088/0963-0252/23/3/035001

M3 - Article

VL - 23

SP - 350011

EP - 3500111

JO - Plasma sources science & technology

JF - Plasma sources science & technology

SN - 0963-0252

ER -