Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOx film growth
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Lawrence Berkeley National Laboratory
Details
| Original language | English |
|---|---|
| Pages (from-to) | 1-11 |
| Number of pages | 11 |
| Journal | Plasma sources science & technology |
| Volume | 25 |
| DOIs | |
| Publication status | Published - 2016 |
