Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films

Prohaska, T., Ritala, M., Leskelä, M., Niinistö, L., FRIEDBACHER, G. & GRASSERBAUER, M., 1994, In: Thin solid films. p. 155-162

Research output: Contribution to journal › Article › Research › peer-review

Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films

Pedarnig, J. D., Siraj, K., Bodea, M. A., Puica, I., Lang, W., Kolarova, R., Bauer, P., Haselgrübler, K., Hasenfuss, C., Beinik, I. & Teichert, C., 2010, In: Thin solid films. 518, p. 7075-7080

Research output: Contribution to journal › Article › Research › peer-review

Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy

Prohaska, T., Ritala, M., Saloniemi, H., Leskelä, M. & FRIEDBACHER, G., 1996, In: Thin solid films. p. 54-58

Research output: Contribution to journal › Article › Research › peer-review

Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films

Flink, A., Andersson, J. M., Alling, B., Daniel, R., Sjölen, J., Karlsson, L. & Hultmann, L., 2008, In: Thin solid films. 517, p. 714-721

Research output: Contribution to journal › Article › Research › peer-review

Structure and properties of sputter deposited crystalline and amorphous Cu-Ti films

Turnow, H., Wendrock, H., Menzel, S., Gemming, T. & Eckert, J., 1 Jan 2016, In: Thin solid films. 598, p. 184-188 5 p.

Research output: Contribution to journal › Article › Research › peer-review

Structure and Properties of Pulsed-Laser Deposited Carbon Nitride Thin Films

Riascos, H., Neidhardt, J., Radnoczi, G. Z., Emmerlich, J., Zambrano, G., Hultman, L. & Prieto, P., 2006, In: Thin solid films. 497, p. 1-6

Research output: Contribution to journal › Article › Research › peer-review

Structure and properties of magnetron sputtered Zr-Si-N films with a high (≥25 at.%) Si content

Musil, J., Daniel, R., Zeman, P. & Takai, O., 2005, In: Thin solid films.

Research output: Contribution to journal › Article › Research › peer-review

Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit

Paulitsch, J., Schenkel, M., Zufraß, T., Mayrhofer, P. H. & Münz, W.-D., 2010, In: Thin solid films. 518, p. 5558-5564

Research output: Contribution to journal › Article › Research › peer-review

Structure and mechanical properties of CrN/TiN multilayer coatings prepared by a combined HIPIMS/UBMS deposition technique

Paulitsch, J., Mayrhofer, P. H., Münz, W.-D. & Schenkel, M., 2008, In: Thin solid films. 517, p. 1239-1244

Research output: Contribution to journal › Article › Research › peer-review

Structural, mechanical and tribological investigations of pulsed laser deposited titanium nitride coatings

Lackner, J. M., Waldhauser, W., Berghauser, R., Ebner, R., Major, B. & Schöberl, T., 2004, In: Thin solid films. 453-454, p. 195-202

Research output: Contribution to journal › Article › Research › peer-review