Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • M. Ritala
  • M. Leskelä
  • L. Niinistö
  • G FRIEDBACHER
  • M GRASSERBAUER

Details

Original languageEnglish
Pages (from-to) 155-162
JournalThin solid films
Publication statusPublished - 1994