Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films

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Translated title of the contribution	Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films
Original language	English
Pages (from-to)	714-721
Journal	Thin solid films
Volume	517
DOIs	https://doi.org/10.1016/j.tsf.2008.08.126
Publication status	Published - 2008