Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films
Research output: Contribution to journal › Article › Research › peer-review
Standard
Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films. / Flink, A.; Andersson, J.M.; Alling, B. et al.
In: Thin solid films, Vol. 517, 2008, p. 714-721.
In: Thin solid films, Vol. 517, 2008, p. 714-721.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Flink, A, Andersson, JM, Alling, B, Daniel, R, Sjölen, J, Karlsson, L & Hultmann, L 2008, 'Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films', Thin solid films, vol. 517, pp. 714-721. https://doi.org/10.1016/j.tsf.2008.08.126
APA
Flink, A., Andersson, J. M., Alling, B., Daniel, R., Sjölen, J., Karlsson, L., & Hultmann, L. (2008). Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films. Thin solid films, 517, 714-721. https://doi.org/10.1016/j.tsf.2008.08.126
Vancouver
Flink A, Andersson JM, Alling B, Daniel R, Sjölen J, Karlsson L et al. Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films. Thin solid films. 2008;517:714-721. doi: 10.1016/j.tsf.2008.08.126
Author
Bibtex - Download
@article{e002cabb34814cfbbe48f1a58e09b3df,
title = "Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films",
author = "A. Flink and J.M. Andersson and B. Alling and Rostislav Daniel and J. Sj{\"o}len and L. Karlsson and L. Hultmann",
year = "2008",
doi = "10.1016/j.tsf.2008.08.126",
language = "English",
volume = "517",
pages = "714--721",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films
AU - Flink, A.
AU - Andersson, J.M.
AU - Alling, B.
AU - Daniel, Rostislav
AU - Sjölen, J.
AU - Karlsson, L.
AU - Hultmann, L.
PY - 2008
Y1 - 2008
U2 - 10.1016/j.tsf.2008.08.126
DO - 10.1016/j.tsf.2008.08.126
M3 - Article
VL - 517
SP - 714
EP - 721
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -
