Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Standard

Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films. / Flink, A.; Andersson, J.M.; Alling, B. et al.
in: Thin solid films, Jahrgang 517, 2008, S. 714-721.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Harvard

Flink, A, Andersson, JM, Alling, B, Daniel, R, Sjölen, J, Karlsson, L & Hultmann, L 2008, 'Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films', Thin solid films, Jg. 517, S. 714-721. https://doi.org/10.1016/j.tsf.2008.08.126

APA

Flink, A., Andersson, J. M., Alling, B., Daniel, R., Sjölen, J., Karlsson, L., & Hultmann, L. (2008). Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films. Thin solid films, 517, 714-721. https://doi.org/10.1016/j.tsf.2008.08.126

Vancouver

Flink A, Andersson JM, Alling B, Daniel R, Sjölen J, Karlsson L et al. Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films. Thin solid films. 2008;517:714-721. doi: 10.1016/j.tsf.2008.08.126

Author

Flink, A. ; Andersson, J.M. ; Alling, B. et al. / Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films. in: Thin solid films. 2008 ; Jahrgang 517. S. 714-721.

Bibtex - Download

@article{e002cabb34814cfbbe48f1a58e09b3df,
title = "Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films",
author = "A. Flink and J.M. Andersson and B. Alling and Rostislav Daniel and J. Sj{\"o}len and L. Karlsson and L. Hultmann",
year = "2008",
doi = "10.1016/j.tsf.2008.08.126",
language = "English",
volume = "517",
pages = "714--721",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1-xSixN thin films

AU - Flink, A.

AU - Andersson, J.M.

AU - Alling, B.

AU - Daniel, Rostislav

AU - Sjölen, J.

AU - Karlsson, L.

AU - Hultmann, L.

PY - 2008

Y1 - 2008

U2 - 10.1016/j.tsf.2008.08.126

DO - 10.1016/j.tsf.2008.08.126

M3 - Article

VL - 517

SP - 714

EP - 721

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -