Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films

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Authors

Translated title of the contribution	Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films
Original language	English
Pages (from-to)	7075-7080
Journal	Thin solid films
Volume	518
DOIs	https://doi.org/10.1016/j.tsf.2010.07.021
Publication status	Published - 2010