Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films
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In: Thin solid films, Vol. 518, 2010, p. 7075-7080.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Surface planarization and masked ion-beam structuring of YBa2Cu3O7 thin films
AU - Pedarnig, J.D.
AU - Siraj, K.
AU - Bodea, M.A.
AU - Puica, I.
AU - Lang, W.
AU - Kolarova, R.
AU - Bauer, P.
AU - Haselgrübler, K.
AU - Hasenfuss, C.
AU - Beinik, Igor
AU - Teichert, Christian
PY - 2010
Y1 - 2010
U2 - 10.1016/j.tsf.2010.07.021
DO - 10.1016/j.tsf.2010.07.021
M3 - Article
VL - 518
SP - 7075
EP - 7080
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -