Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101
1 - 10 out of 28Page size: 10

Research output

  1. Published

    Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates

    Xia, A., Glushko, O., Cordill, M. & Franz, R., 2018, In: Journal of vacuum science & technology / A (JVST). p. 010601-1-010601-4

    Research output: Contribution to journal › Article › Research › peer-review

  2. Published

    Oxidation behavior of arc evaporated Al-Cr-Si-N thin films

    Tritremmel, C., Daniel, R., Mitterer, C., Mayrhofer, P. H., Lechthaler, M. & Polcik, P., 2012, In: Journal of vacuum science & technology / A (JVST). 30, p. 061501-1-061501-6

    Research output: Contribution to journal › Article › Research › peer-review

  3. Published

    Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 1 Jul 2016, In: Journal of vacuum science & technology / A (JVST). 34.2016, 4, 8 p., 041517.

    Research output: Contribution to journal › Article › Research › peer-review

  4. Published

    Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings

    Saringer, C., Oberroither, C., Zorn, K., Franz, R. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, 2

    Research output: Contribution to journal › Article › Research › peer-review

  5. Published

    Thermal stability and thermo-mechanical properties of magnetron sputtered Cr-Al-Y-N coatings

    Rovere, F. & Mayrhofer, P. H., 2008, In: Journal of vacuum science & technology / A (JVST). A26, p. 29-35

    Research output: Contribution to journal › Article › Research › peer-review

  6. Published

    Impact of Yttrium on structure and mechanical properties of Cr-Al-N thin films

    Rovere, F. & Mayrhofer, P. H., 2007, In: Journal of vacuum science & technology / A (JVST). 25, p. 1336-1340

    Research output: Contribution to journal › Article › Research › peer-review

  7. Published

    Oxidation of arc evaporated Al1-xCrxN coatings

    Reiter, A., Mitterer, C. & Sartory, B., 2007, In: Journal of vacuum science & technology / A (JVST). A 25, p. 711-720

    Research output: Contribution to journal › Article › Research › peer-review

  8. Published

    Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target

    Rausch, M., Mraz, S., Kreiml, P., Cordill, M. J., Schneider, J. M., Winkler, J. & Mitterer, C., 2020, In: Journal of vacuum science & technology / A (JVST). 38.2020, 2, p. 1-10 023401.

    Research output: Contribution to journal › Article › Research › peer-review

  9. Published

    Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

    Pilz, J., Perrotta, A., Christian, P., Tazreiter, M., Resel, R., Leising, G., Griesser, T. & Coclite, A. M., 1 Jan 2018, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 1, 01A109.

    Research output: Contribution to journal › Article › Research › peer-review

  10. Published

    On the effect of Ta on improved oxidation resistance of Ti-Al-Ta-N coatings

    Pfeiler, M., Scheu, C., Hutter, H., Schnöller, J., Michotte, C., Mitterer, C. & Kathrein, M., 2009, In: Journal of vacuum science & technology / A (JVST). 27, p. 554-560

    Research output: Contribution to journal › Article › Research › peer-review

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