Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101
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Research output

  1. Published

    Link between cracking mechanisms of trilayer films on flexible substrates and electro-mechanical reliability under biaxial loading

    Altaf Husain, S., Kreiml, P., Renault, P.-O., Mitterer, C., Cordill, M. J. & Faurie, D., 14 Mar 2023, In: Journal of vacuum science & technology / A (JVST). 41.2023, 3, 8 p., 033403.

    Research output: Contribution to journal › Article › Research › peer-review

  2. Published

    Para-Sexiphenyl Thin Films Grown by Hot Wall Epitaxy on KCI(001)substrates

    Andreev, A., Montaigne, A., Hlawacek, G., Sitter, H. & Teichert, C., 2006, In: Journal of vacuum science & technology / A (JVST). 24, p. 1660-1663

    Research output: Contribution to journal › Article › Research › peer-review

  3. Published

    Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects

    Angay, F., Löfler, L., Tetard, F., Eyidi, D., Djemia, P., Holec, D. & Abadias, G., 1 Sept 2020, In: Journal of vacuum science & technology / A (JVST). 38.2020, 5, p. ´ 14 p., 053401.

    Research output: Contribution to journal › Article › Research › peer-review

  4. Published

    Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

    Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C. & Mitterer, C., Jul 2011, In: Journal of vacuum science & technology / A (JVST). 29, 4, 041506.

    Research output: Contribution to journal › Article › Research › peer-review

  5. Published

    Effects of thermal annealing on the microstructure of sputtered Al2O3 coatings

    Edlmayr, V., Harzer, T. P., Hoffmann, R., Kiener, D., Scheu, C. & Mitterer, C., 2011, In: Journal of vacuum science & technology / A (JVST). p. 0415061-0415068

    Research output: Contribution to journal › Article › Research › peer-review

  6. Published

    Investigation on structure and properties of arc-evaporated HfAIN hard coatings

    Franz, R., Mitterer, C., Lechthaler, M. & Polzer, C., 2010, In: Journal of vacuum science & technology / A (JVST). p. 528-535

    Research output: Contribution to journal › Article › Research › peer-review

  7. Published

    Oxidation and diffusion processes during annealing of AlCrVN hard coatings

    Franz, R., Neidhardt, J., Mitterer, C., Schaffer, B., Hutter, H., Kaindl, R., Sartory, B., Tessadri, R., Lechthaler, M. & Polcik, P., 2008, In: Journal of vacuum science & technology / A (JVST). A26, p. 302-308

    Research output: Contribution to journal › Article › Research › peer-review

  8. Published

    Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

    Franz, R., Mendez Martin, F., Hawranek, G. & Polcik, P., 2016, In: Journal of vacuum science & technology / A (JVST). Vol. 34, No. 2, p. 1-8 8 p.

    Research output: Contribution to journal › Article › Research › peer-review

  9. Published

    Tailoring age hardening of Ti1-xAlxN by Ta alloying

    Großmann, B., Jamnig, A., Schalk, N., Czettl, C., Pohler, M. & Mitterer, C., 13 Sept 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6, 6 p., 060604.

    Research output: Contribution to journal › Article › Research › peer-review

  10. Published

    Oxidation and wet etching behavior of sputtered Mo-Ti-Al films

    Jörg, T., Hofer-Roblyek, A. M., Köstenbauer, H., Winkler, J. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, p. 021513-1-021513-5

    Research output: Contribution to journal › Article › Research › peer-review

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