Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101
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Research output

  1. Published

    Oxidation and diffusion processes during annealing of AlCrVN hard coatings

    Franz, R., Neidhardt, J., Mitterer, C., Schaffer, B., Hutter, H., Kaindl, R., Sartory, B., Tessadri, R., Lechthaler, M. & Polcik, P., 2008, In: Journal of vacuum science & technology / A (JVST). A26, p. 302-308

    Research output: Contribution to journal › Article › Research › peer-review

  2. Published

    On the effect of Ta on improved oxidation resistance of Ti-Al-Ta-N coatings

    Pfeiler, M., Scheu, C., Hutter, H., Schnöller, J., Michotte, C., Mitterer, C. & Kathrein, M., 2009, In: Journal of vacuum science & technology / A (JVST). 27, p. 554-560

    Research output: Contribution to journal › Article › Research › peer-review

  3. Published

    Nanoparticle-functionalized 3D substrates for superior analytical performance in surface enhanced Raman spectroscopy

    Mouti, N.-M., Kostoglou, N., Obenaus-Emler, R. & Mitterer, C., 3 Apr 2025, In: Journal of vacuum science & technology / A (JVST). 43.2025, 3, 12 p., 033103.

    Research output: Contribution to journal › Article › Research › peer-review

  4. Published

    Micromechanical Properties of Micro- and Nanocrystalline CVD Diamond Thin Films with Gradient Microstructures and Stresses

    Meindlhumer, M., Ziegelwanger, T., Grau, J., Sternschulte, H., Sztucki, M., Steinmüller-Nethl, D. & Keckes, J., 12 Jan 2024, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 42.2024, 2, 12 p., 023401.

    Research output: Contribution to journal › Article › Research › peer-review

  5. Published

    Link between cracking mechanisms of trilayer films on flexible substrates and electro-mechanical reliability under biaxial loading

    Altaf Husain, S., Kreiml, P., Renault, P.-O., Mitterer, C., Cordill, M. J. & Faurie, D., 14 Mar 2023, In: Journal of vacuum science & technology / A (JVST). 41.2023, 3, 8 p., 033403.

    Research output: Contribution to journal › Article › Research › peer-review

  6. Published

    Lead-free dielectric thin films: Synthesis of Ag(Nb1−xTax)O3 via reactive dc magnetron sputtering

    Kölbl, L., Mehrabi, M., Griesser, T., Munnik, F. & Mitterer, C., 6 Dec 2024, In: Journal of vacuum science & technology / A (JVST). 43.2024, 1, 11 p.

    Research output: Contribution to journal › Article › Research › peer-review

  7. Published

    Investigation on structure and properties of arc-evaporated HfAIN hard coatings

    Franz, R., Mitterer, C., Lechthaler, M. & Polzer, C., 2010, In: Journal of vacuum science & technology / A (JVST). p. 528-535

    Research output: Contribution to journal › Article › Research › peer-review

  8. Published

    In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study

    Knabl, F., Bandl, C., Griesser, T. & Mitterer, C., 17 Jan 2024, In: Journal of vacuum science & technology / A (JVST). 42.2024, 2, 10 p., 023201.

    Research output: Contribution to journal › Article › Research › peer-review

  9. Published

    Influence of discharge power and bias potential on microstructure and hardness of sputtered amorphous carbon coatings

    Saringer, C., Oberroither, C., Zorn, K., Franz, R. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, 2

    Research output: Contribution to journal › Article › Research › peer-review

  10. Published

    Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

    Pachlhofer, J., Martin-Luengo, A. T., Franz, R., Franzke, E., Köstenbauer, H., Winkler, J., Bonanni, A. & Mitterer, C., 4 Jan 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 2, 8 p., 021504.

    Research output: Contribution to journal › Article › Research › peer-review

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