Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101
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Research output

  1. Published

    Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

    Pilz, J., Perrotta, A., Christian, P., Tazreiter, M., Resel, R., Leising, G., Griesser, T. & Coclite, A. M., 1 Jan 2018, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 1, 01A109.

    Research output: Contribution to journal › Article › Research › peer-review

  2. Published

    Thermal stability of sputtered intermetallic Al-Au coatings

    Moser, M., Mayrhofer, P. H., Rainforth, W. M. & Ross, I. M., 2007, In: Journal of vacuum science & technology / A (JVST). p. 1402-1406

    Research output: Contribution to journal › Article › Research › peer-review

  3. Published

    Thermal stability and thermo-mechanical properties of magnetron sputtered Cr-Al-Y-N coatings

    Rovere, F. & Mayrhofer, P. H., 2008, In: Journal of vacuum science & technology / A (JVST). A26, p. 29-35

    Research output: Contribution to journal › Article › Research › peer-review

  4. Published

    Tailoring age hardening of Ti1-xAlxN by Ta alloying

    Großmann, B., Jamnig, A., Schalk, N., Czettl, C., Pohler, M. & Mitterer, C., 13 Sept 2017, In: Journal of vacuum science & technology / A (JVST). 35.2017, 6, 6 p., 060604.

    Research output: Contribution to journal › Article › Research › peer-review

  5. Published

    Structure, stress, and mechanical properties of Mo-Al-N thin films deposited by dc reactive magnetron cosputtering: Role of point defects

    Angay, F., Löfler, L., Tetard, F., Eyidi, D., Djemia, P., Holec, D. & Abadias, G., 1 Sept 2020, In: Journal of vacuum science & technology / A (JVST). 38.2020, 5, p. ´ 14 p., 053401.

    Research output: Contribution to journal › Article › Research › peer-review

  6. Published

    Para-Sexiphenyl Thin Films Grown by Hot Wall Epitaxy on KCI(001)substrates

    Andreev, A., Montaigne, A., Hlawacek, G., Sitter, H. & Teichert, C., 2006, In: Journal of vacuum science & technology / A (JVST). 24, p. 1660-1663

    Research output: Contribution to journal › Article › Research › peer-review

  7. Published

    Oxidation of arc evaporated Al1-xCrxN coatings

    Reiter, A., Mitterer, C. & Sartory, B., 2007, In: Journal of vacuum science & technology / A (JVST). A 25, p. 711-720

    Research output: Contribution to journal › Article › Research › peer-review

  8. Published

    Oxidation behavior of arc evaporated Al-Cr-Si-N thin films

    Tritremmel, C., Daniel, R., Mitterer, C., Mayrhofer, P. H., Lechthaler, M. & Polcik, P., 2012, In: Journal of vacuum science & technology / A (JVST). 30, p. 061501-1-061501-6

    Research output: Contribution to journal › Article › Research › peer-review

  9. E-pub ahead of print

    Oxidation behavior of a cathodic arc evaporated Cr0.69Ta0.20B0.11N coating

    Kainz, C., Letofsky-Papst, I., Saringer, C., Krüger, H., Stark, A., Schell, N., Pohler, M. & Czettl, C., 1 Feb 2023, (E-pub ahead of print) In: Journal of vacuum science & technology / A (JVST). 41.2023, 2, 10 p., 023102.

    Research output: Contribution to journal › Article › Research › peer-review

  10. Published

    Oxidation and wet etching behavior of sputtered Mo-Ti-Al films

    Jörg, T., Hofer-Roblyek, A. M., Köstenbauer, H., Winkler, J. & Mitterer, C., 2018, In: Journal of vacuum science & technology / A (JVST). 36, p. 021513-1-021513-5

    Research output: Contribution to journal › Article › Research › peer-review

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