Journal of vacuum science & technology / A (JVST), ‎0734-2101

Journal

ISSNs0734-2101

Research output

  1. Published

    Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target

    Rausch, M., Mraz, S., Kreiml, P., Cordill, M. J., Schneider, J. M., Winkler, J. & Mitterer, C., 2020, In: Journal of vacuum science & technology / A (JVST). 38.2020, 2, p. 1-10 023401.

    Research output: Contribution to journalArticleResearchpeer-review

  2. Published

    Oxidation of arc evaporated Al1-xCrxN coatings

    Reiter, A., Mitterer, C. & Sartory, B., 2007, In: Journal of vacuum science & technology / A (JVST). A 25, p. 711-720

    Research output: Contribution to journalArticleResearchpeer-review

  3. Published
  4. Published

    Impact of Yttrium on structure and mechanical properties of Cr-Al-N thin films

    Rovere, F. & Mayrhofer, P. H., 2007, In: Journal of vacuum science & technology / A (JVST). 25, p. 1336-1340

    Research output: Contribution to journalArticleResearchpeer-review

  5. Published

    Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

    Saringer, C., Franz, R., Zorn, K. & Mitterer, C., 1 Jul 2016, In: Journal of vacuum science & technology / A (JVST). 34.2016, 4, 8 p., 041517.

    Research output: Contribution to journalArticleResearchpeer-review

  6. Published
  7. Published

    Oxidation behavior of arc evaporated Al-Cr-Si-N thin films

    Tritremmel, C., Daniel, R., Mitterer, C., Mayrhofer, P. H., Lechthaler, M. & Polcik, P., 2012, In: Journal of vacuum science & technology / A (JVST). 30, p. 061501-1-061501-6

    Research output: Contribution to journalArticleResearchpeer-review

  8. Published
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