Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT
Publikationen: Konferenzbeitrag › Vortrag › Forschung › (peer-reviewed)
Standard
Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, B. et al.
2014. Functional Integrated nano Systems - nanoFIS 2014, Graz, Österreich.
2014. Functional Integrated nano Systems - nanoFIS 2014, Graz, Österreich.
Publikationen: Konferenzbeitrag › Vortrag › Forschung › (peer-reviewed)
Harvard
Mühlbacher, M, Mendez Martin, F, Sartory, B, Lu, J, Schalk, N, Lars, H & Mitterer, C 2014, 'Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT', Functional Integrated nano Systems - nanoFIS 2014, Graz, Österreich, 3/12/14 - 5/12/14.
APA
Mühlbacher, M., Mendez Martin, F., Sartory, B., Lu, J., Schalk, N., Lars, H., & Mitterer, C. (2014). Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT. Functional Integrated nano Systems - nanoFIS 2014, Graz, Österreich.
Vancouver
Mühlbacher M, Mendez Martin F, Sartory B, Lu J, Schalk N, Lars H et al.. Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT. 2014. Functional Integrated nano Systems - nanoFIS 2014, Graz, Österreich.
Author
Bibtex - Download
@conference{5d2d6934336148f085f623597d31950c,
title = "Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT",
author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and B. Sartory and J. Lu and Nina Schalk and Hultman Lars and Christian Mitterer",
year = "2014",
language = "English",
note = "nanoFIS Konferenz ; Conference date: 03-12-2014 Through 05-12-2014",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT
AU - Mühlbacher, Marlene
AU - Mendez Martin, Francisca
AU - Sartory, B.
AU - Lu, J.
AU - Schalk, Nina
AU - Lars, Hultman
AU - Mitterer, Christian
PY - 2014
Y1 - 2014
M3 - Presentation
T2 - nanoFIS Konferenz
Y2 - 3 December 2014 through 5 December 2014
ER -
