Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT

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Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, B. et al.
2014. nanoFIS Konferenz, Graz, Austria.

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@conference{5d2d6934336148f085f623597d31950c,
title = "Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT",
author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and B. Sartory and J. Lu and Nina Schalk and Hultman Lars and Christian Mitterer",
year = "2014",
language = "English",
note = "nanoFIS Konferenz ; Conference date: 03-12-2014 Through 05-12-2014",

}

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TY - CONF

T1 - Influence of microstructure on diffusion barrier properties of TiN investigated by TEM and APT

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, B.

AU - Lu, J.

AU - Schalk, Nina

AU - Lars, Hultman

AU - Mitterer, Christian

PY - 2014

Y1 - 2014

M3 - Presentation

T2 - nanoFIS Konferenz

Y2 - 3 December 2014 through 5 December 2014

ER -