Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis

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@article{a6ccb28f34974e898d52b18ca3951fb8,
title = "Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis",
author = "Vipin Chawla and David Holec and Mayrhofer, {Paul Heinz}",
year = "2012",
doi = "10.1016/j.commatsci.2011.11.024",
language = "English",
volume = "55",
pages = "211--216",
journal = "Computational materials science",
issn = "0927-0256",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis

AU - Chawla, Vipin

AU - Holec, David

AU - Mayrhofer, Paul Heinz

PY - 2012

Y1 - 2012

U2 - 10.1016/j.commatsci.2011.11.024

DO - 10.1016/j.commatsci.2011.11.024

M3 - Article

VL - 55

SP - 211

EP - 216

JO - Computational materials science

JF - Computational materials science

SN - 0927-0256

ER -