Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis

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Authors

Translated title of the contribution	Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
Original language	English
Pages (from-to)	211-216
Journal	Computational materials science
Volume	55
DOIs	https://doi.org/10.1016/j.commatsci.2011.11.024
Publication status	Published - 2012