Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
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| Translated title of the contribution | Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis |
|---|---|
| Original language | English |
| Pages (from-to) | 211-216 |
| Journal | Computational materials science |
| Volume | 55 |
| DOIs | |
| Publication status | Published - 2012 |
